JPH02129349U - - Google Patents
Info
- Publication number
- JPH02129349U JPH02129349U JP3875189U JP3875189U JPH02129349U JP H02129349 U JPH02129349 U JP H02129349U JP 3875189 U JP3875189 U JP 3875189U JP 3875189 U JP3875189 U JP 3875189U JP H02129349 U JPH02129349 U JP H02129349U
- Authority
- JP
- Japan
- Prior art keywords
- driving force
- chamber
- gear
- meshing
- gears
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989038751U JPH0734011Y2 (ja) | 1989-03-31 | 1989-03-31 | 移動成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989038751U JPH0734011Y2 (ja) | 1989-03-31 | 1989-03-31 | 移動成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02129349U true JPH02129349U (en]) | 1990-10-25 |
| JPH0734011Y2 JPH0734011Y2 (ja) | 1995-08-02 |
Family
ID=31547042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989038751U Expired - Lifetime JPH0734011Y2 (ja) | 1989-03-31 | 1989-03-31 | 移動成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734011Y2 (en]) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS617104A (ja) * | 1984-06-21 | 1986-01-13 | Honda Motor Co Ltd | 格納装置 |
| JPS61101507U (en]) * | 1984-12-10 | 1986-06-28 | ||
| JPS63185712A (ja) * | 1987-01-28 | 1988-08-01 | Nippon Soken Inc | 真空蒸着装置の搬送機構 |
| JPS63300009A (ja) * | 1987-05-28 | 1988-12-07 | Semiconductor Energy Lab Co Ltd | 基板搬送機構 |
-
1989
- 1989-03-31 JP JP1989038751U patent/JPH0734011Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS617104A (ja) * | 1984-06-21 | 1986-01-13 | Honda Motor Co Ltd | 格納装置 |
| JPS61101507U (en]) * | 1984-12-10 | 1986-06-28 | ||
| JPS63185712A (ja) * | 1987-01-28 | 1988-08-01 | Nippon Soken Inc | 真空蒸着装置の搬送機構 |
| JPS63300009A (ja) * | 1987-05-28 | 1988-12-07 | Semiconductor Energy Lab Co Ltd | 基板搬送機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0734011Y2 (ja) | 1995-08-02 |